LASER PROCESSING APPARATUS AND METHOD USING POLYGON MIRROR TO IMPROVE PROCESSING EFFICIENCY AND YIELD OF OBJECT

摘要

PURPOSE: A laser processing apparatus using a polygon mirror is provided to improve processing efficiency and yield of an object by dividing a laser beam on a reflection surface of a polygon mirror into a plurality of beams and by repeatedly processing the object at low energy of the divided laser beams. CONSTITUTION: A laser generation unit(140) generates and outputs a laser beam with a predetermined diameter. A polygon mirror(10) has a plurality of reflection surfaces(12), rotating with respect to an axis. The polygon mirror reflects the laser that is generated from the laser generation unit and is incident upon the reflection surface, wherein the number of the reflection surfaces is controlled in a manner that the plurality of reflection surfaces of the polygon mirror is covered with the diameter of the laser beam. A lens(20) collects the laser beam reflected from the polygon mirror and irradiates the laser beam to an object(40) to be processed.