REACTIVE RADIAL-STRUCTURED POLYMER COMPRISING ETHER-STRUCTURED CENTER PART AND METHOXY OR ETHOXY SILANE TERMINAL GROUP, PREPARATION METHOD THEREOF, AND POLYMER THIN FILM HAVING LOW DIELECTRIC CONSTANT USING THE POLYMER

摘要

PURPOSE: Provided are a reactive radial-structured polymer, its preparation method and a polymer thin film using the polymer which contains a nano-sized micropore and has a low dielectric constant. CONSTITUTION: The reactive radial-structured polymer has an ether structure represented by the formula 1 and contains a methoxy or ethoxy silane terminal group, wherein n is 2 or more; R is a group derived from a polyvalent alcohol (R-(OH)n, n=2); X is -OCONH-(CH2)3-Si(OC2H5)3, -OCH2CH(CH3)-CH2O(CH2)3-Si(CH3)2(OC2H5), -OCH2CH(OH)-CH2O(CH2)3-Si(CH3)(OC2H5)2 or -OCH2CH(OH)-CH2O(CH2)3-Si(CH3)(OCH3)2. Preferably the polymer has a molecular weight of 500-20,000.