PROJECTIVE OPTICAL SYSTEM WITH WIDE VISION FOR FLAT PANEL DISPLAY TO PROVIDE ABERRATION CORRECTION FUNCTION AND TO IMPROVE PRODUCTION RATE IN CONVENIENT WAY

摘要

PURPOSE: A projective optical system with wide vision used in an exposure system for a flat panel display(FPD) is provided to give magnification and aberration correction functions and to improve production rate in convenient way, by using a relatively simple optical design. CONSTITUTION: The optical system used in an exposure system for preparing FPD, wherein the exposure system comprises a reticle stage for supporting a reticle(303) and a substrate stage for supporting a substrate(304) and the optical system, is a reflective optical system to image the reticle to the substrate, wherein the reflective optical system comprises a main mirror including a first mirror(301a) that is aspheric and concave and a second mirror(301b) that is concave, and a secondary mirror(302) that is convex. By using those mirrors, the reflective optical system has a sufficient degree of freedom to correction and alignment of aberration when projection of the reticle image to the substrate through reflection is made.