SEMICONDUCTOR DEVICE TEST APPARATUS AND METHOD FOR CONTROLLING ROBOT SPEED THEREOF IMPROVING PRODUCTIVITY OF TEST PROCESS BY CHANGING TEST TRAY OPERATING SYSTEM

摘要

PURPOSE: A semiconductor device test apparatus and a method for controlling robot speed thereof is provided to improve the productivity of a test process by changing the operating system of the test tray and its peripheral units. CONSTITUTION: A semiconductor device test apparatus includes a body and the following units. a supply part(214) of a user tray and a sending out part(214') of the user tray is formed in a stacker(210). Devices waiting for test on the user tray is seated on a test tray of a device loading part(220) by a loading robot(217). The test tray received from the device loading part is precooled or preheated by a soak chamber(251). The preheated or precooled devices is tested by a test chamber(253). The devices come out from the test chamber is sent to a device unloading part(290) after recovering a room temperature by a desoak chamber(257). The devices of the device unloading part are picked up and transferred to a plurality of sorter table(274) by a classifying robot(273) according to a test result. The devices transferred to a plurality of the sorter table are picked up and send to the sending out part of the user tray by an unloading robot(291). The sock chamber, the test chamber and the desoak chamber are capable of separating from the body by a sliding unit.