首页> 外国专利> SEMICONDUCTOR DEVICE WITH GATE INSULATION LAYERS OF DIFFERENT THICKNESSES BY NITROGEN ION IMPLANTATION PROCESS AND FABRICATING METHOD THEREOF TO PREVENT SEMICONDUCTOR SUBSTRATE FROM BEING DAMAGED BY PLURAL PHOTOLITHOGRAPHY PROCESSES

SEMICONDUCTOR DEVICE WITH GATE INSULATION LAYERS OF DIFFERENT THICKNESSES BY NITROGEN ION IMPLANTATION PROCESS AND FABRICATING METHOD THEREOF TO PREVENT SEMICONDUCTOR SUBSTRATE FROM BEING DAMAGED BY PLURAL PHOTOLITHOGRAPHY PROCESSES

机译:氮离子注入法不同厚度门控绝缘层的半导体器件及其制备方法,以防止被多次光电子照相法损坏

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