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ULTRA LARGE SCALE INTEGRATION SEMICONDUCTOR DEVICE FORMED ON SOI AND FABRICATING METHOD THEREOF TO DROP OPERATIONAL VOLTAGE APPLIED TO DRAIN
ULTRA LARGE SCALE INTEGRATION SEMICONDUCTOR DEVICE FORMED ON SOI AND FABRICATING METHOD THEREOF TO DROP OPERATIONAL VOLTAGE APPLIED TO DRAIN
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机译:SOI制的超大规模集成半导体器件及其制造方法,以降低流失在排水中的工作电压
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摘要
PURPOSE: An ultra large scale integration semiconductor device formed on an SOI and a fabricating method thereof are provided to drop an operational voltage applied to a drain by reducing the amount of NM ions in an ion implantation process. CONSTITUTION: A gate oxide layer(115) is formed on an active region. A gate poly(108) is formed on the gate oxide layer. A first lightly-doped drain spacer(140) is formed on a lateral part of the gate oxide layer and the gate poly on the active region. A second lightly-doped drain spacer(142) is formed on the first lightly-doped drain spacer. A salicide layer(130) is formed on a peripheral part of the active region and on the gate poly. A plurality of metal connections(132,134,136) are formed on the salicide layer.
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