PLASMA REACTOR CAPABLE OF REDUCING MANUFACTURING COST AND VOLUME OF THE PLASMA REACTOR

摘要

PURPOSE: A plasma reactor is provided to reduce manufacturing cost and a volume of the reactor by forming a faraday shield and a heat emitter in one entity. CONSTITUTION: A plasma reactor includes a coil antenna(106), a metallic member(109), and a plate(105). The coil antenna receives high frequency power and emits an electromagnetic wave. The metallic member shields the electromagnetic wave. The plate is provided on a lower portion of the metallic member to form a plasma generating region in the plasma reactor. The metallic member includes a heat emitter for heating the metallic member. The heat emitter is provided to adjust the temperature of the plate.