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GAS SENSOR USING CARBON NANO-TUBE AND METHOD FOR MANUFACTURING THE SAME FOR FABRICATING GAS SENSOR BY DIRECTLY GROWING CARBON NANO-TUBE ON ELECTRODE THROUGH CHEMICAL VAPOR PROCESS
GAS SENSOR USING CARBON NANO-TUBE AND METHOD FOR MANUFACTURING THE SAME FOR FABRICATING GAS SENSOR BY DIRECTLY GROWING CARBON NANO-TUBE ON ELECTRODE THROUGH CHEMICAL VAPOR PROCESS
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机译:利用碳纳米管的气体传感器和通过化学气相法在电极上直接生长碳纳米管的制造气体传感器的方法
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摘要
PURPOSE: A gas sensor using carbon nano-tube and a method for manufacturing the same are provided to simplify a manufacturing process of the carbon nano-tube by adjusting the density of the carbon nano-tube. CONSTITUTION: A substrate is given in order to manufacture a gas sensor using a carbon nano-tube. The substrate has a predetermined electrode pattern formed thereon. The material of the carbon nano-tube is provided. Solvent is provided in order to spray the carbon nano-tube. An ultrasonic process is performed by adding the carbon nano-tube to the solvent. The carbon nano-tube formed on the upper layer of a solution is retrieved after rotating the solution over a predetermined rotation number. A contact resistance between electrodes of the carbon nano-tube is reduced through a thermal treatment after the distribution step.
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