首页> 外国专利> GAS SENSOR USING CARBON NANO-TUBE AND METHOD FOR MANUFACTURING THE SAME FOR FABRICATING GAS SENSOR BY DIRECTLY GROWING CARBON NANO-TUBE ON ELECTRODE THROUGH CHEMICAL VAPOR PROCESS

GAS SENSOR USING CARBON NANO-TUBE AND METHOD FOR MANUFACTURING THE SAME FOR FABRICATING GAS SENSOR BY DIRECTLY GROWING CARBON NANO-TUBE ON ELECTRODE THROUGH CHEMICAL VAPOR PROCESS

机译:利用碳纳米管的气体传感器和通过化学气相法在电极上直接生长碳纳米管的制造气体传感器的方法

摘要

PURPOSE: A gas sensor using carbon nano-tube and a method for manufacturing the same are provided to simplify a manufacturing process of the carbon nano-tube by adjusting the density of the carbon nano-tube. CONSTITUTION: A substrate is given in order to manufacture a gas sensor using a carbon nano-tube. The substrate has a predetermined electrode pattern formed thereon. The material of the carbon nano-tube is provided. Solvent is provided in order to spray the carbon nano-tube. An ultrasonic process is performed by adding the carbon nano-tube to the solvent. The carbon nano-tube formed on the upper layer of a solution is retrieved after rotating the solution over a predetermined rotation number. A contact resistance between electrodes of the carbon nano-tube is reduced through a thermal treatment after the distribution step.
机译:目的:提供一种使用碳纳米管的气体传感器及其制造方法,以通过调节碳纳米管的密度来简化碳纳米管的制造工艺。组成:给出了一个基板,以便使用碳纳米管制造气体传感器。基板上形成有预定的电极图案。提供了碳纳米管的材料。提供溶剂以喷射碳纳米管。通过将碳纳米管添加到溶剂中来执行超声处理。在溶液旋转预定转数之后,回收形成在溶液上层的碳纳米管。在分配步骤之后,通过热处理降低了碳纳米管的电极之间的接触电阻。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号