APPARATUS AND METHOD FOR DIAGNOSING PRECURSOR TRANSMUTATION FOR ORGANIC METAL CHEMICAL VAPOR DEPOSITION PROCESS INCLUDING INFRARED SPECTROPHOTOMETER CONNECTED TO REACTOR FOR PRELIMINARILY DIAGNOSING PRECURSOR TRANSMUTATION

摘要

PURPOSE: An apparatus and a method for diagnosing a precursor transmutation for an organic metal chemical vapor deposition process are provided to preliminarily diagnose the precursor transmutation by connecting an infrared spectrophotometer to a reactor. CONSTITUTION: An apparatus for diagnosing a precursor transmutation includes a bombe(100) for receiving a carrier gas(100a). One side of a first pipe(110) is connected to the bombe(100). A vessel(200) is provided to receive a liquid metal organic precursor(200a) therein. The vessel(200) is connected to other side of the first pipe(110) in such a manner that the carrier gas(100a) vaporizes the liquid metal organic precursor(200a) by bubbling the metal organic precursor(200a). A second pipe(210) is connected to the vessel(200) in such a manner that one side of the second pipe(210) is arranged on a surface of the metal organic precursor(200a), and the metal organic precursor(200a) and the conveying gas(100a) are conveyed through the second pipe(210).