METHOD FOR FORMING PG FILM BY CVD USING ACETYLENE GAS AND METHANE GAS AS MAIN REACTION GAS

摘要

A kind of purpose: method, for forming the membrane electrode or a film resistance that PG (pyrolytic graphite) film is configured for use as ceramic membrane by CVD (chemical vapor deposition), by using acetylene gas, methane gas, alakan gases and olefinic appropriate hydrocarbon gas as main reaction gas. Construction: a pyrolytic graphite film is formed in the BN films by CVD. By using acetylene gas, (C2H2 is formed in 0. pyrolytic graphite film1000 Dao 2300C temperature under the pressure of 1 to 500 supports: 9.9995), methane gas (CH4: 9.9995), the alakan gases and olefinic appropriate hydrocarbon gas as main reaction gas, hydrogen (H2), helium and argon gas (Ar) as delivery gas.