METHOD OF ANALYZING ALD SOURCE GAS WITHIN ALD APPARATUS BY USING RESIDUAL GAS ANALYZER-QUADRUPLE MASS SPECTROMETER

摘要

Purpose: method of the one kind for analyzing ALD (atomic layer deposition) source gas is arranged to confirm that a sedimentation mechanism uses a kind of ALD methods by correctly analyzing ALD source gases within a deposition chamber. Construction: a pump process will carry out pump gas from a room ALD (S10). One ionization process has 10 Dao the 15eV energy in gas (S12) by accelerating electronics to carry out ionized gas. One mass spectrum is realized by ionized gas to one residual gas analyzer-quadrupole mass spectrometer (S14). One gas analysis process will carry out analysis gas by using mass spectrum (S16).