SYSTEM FOR REAL-TIME MEASURING THE DEGREE OF CURE OF UV CURABLE POLYMER

摘要

The invention UV NIL (nanoimprint) to real-time curing of the UV curable resin to be used in the process also relates to a measuring system, red and IR light source for emitting infrared light, and an interferometer for interfering with the infrared light emitted from the IR light source, UV and a detector for detecting infrared light that has passed through a curing resin sample, consists of a detection result of the detector into a digital processor for outputting the calculation process, FT-IR spectroscopy for analysis by mounting the sample onto the detector, and then the optical path; It includes; chair and UV light source for emitting ultraviolet light, consisting of the ultraviolet light emitted from the UV light source to a light guide for guiding the sample to be irradiated to the installed in a FT-IR spectrometer UV irradiator unit.