METHOD FOR FABRICATING TRIODE CARBON NANOTUBE FIELD EMISSION DEVICE HAVING SELF-ALIGNED GATE-EMITTER STRUCTURE

摘要

To the present invention, the cathode side of a transparent substrate a transparent conductive cathode metal film on the oxide film on the deposition of a gate insulating film and a gate metal film is continuous and with one of the gate hole mask, a gate metal layer, a gate insulating film, and a cathode sequentially sequentially etching a metal film self-aligned to form a cathode transparent to conduct other than forming the through holes with respect to the rest of the films film, and only matches the center of the CNT emitters exactly the gate hole center in the gate hole by the back exposure by applying the photosensitive CNT paste (self-align ) but by proposing a method that simplifies the process CNT emitter and a new field emission device that can gate hole essentially prevent the misalignment problem and propose a method, also, a method of a display device and a surface light source made using the the proposed device.