METHOD OF WASHING USING PULSE ZET TYPE CLEANNING SOLUTION SUPPLY AND DEVICES FOR PERFORMING THE SAME

摘要

A cleaning liquid pulse type of repeating interrupt the supply by a predetermined time and the type of pressure applied to feed form or in a cleaning solution to be supplied to the substrate, and pressure that the cleaning liquid is supplied to the cleaning method for setting a high pressure of / cm ² level of 20kg and a device are disclosed.; According to the invention, a water film is formed on the substrate surface in the washing step to get rid of the problem lowering the cleaning efficiency to increase the cleaning efficiency, it is possible to save the washing liquid.