METHOD OF FABRICATING APERTURE AND MICRO-LENS SYSTEM BY FOCUSED ION BEAM AND MICRO-LENS SYSTEM FABRICATED BY THE SAME

摘要

The present invention relates to a method of forming an opening in a thin sheet, and relates to a method for producing a micro lens system with these openings, more particularly to a method for forming such micro-openings to form the micro-openings of different sizes by using a focused ion beam to a method and a micro-lens system made according thereto for producing a micro lens system, the alignment error is suppressed using a.; Micro-opening method of the present invention comprising the steps of: preparing a sheet having a predetermined thickness; By rotating from the identified center and identifying a center of an opening to be machined in the sheet forming a focused ion beam to a desired bar size and the bar focused ion beam comprises the step of ion milling.