Method of fabricating aperture and micro-lens system by focused ion beam and micro-lens system fabricated by the same

摘要

The present invention relates to a method of forming an opening in a thin sheet, and relates to a method for manufacturing a micro-lens system using these openings, more particularly to form the micro-openings of different sizes and these micro-opening forming method using the focused ion beam method for producing a micro lens system alignment errors are suppressed by using a system and to a micro-lens is manufactured accordingly. ; Micro apertures production method of the present invention includes the steps of preparing a sheet of a predetermined thickness ; And a step and an ion milling step of rotating the bar the focused ion beam to form the ion beam from the identified center bar focusing and confirming the center of the aperture to be machined in the sheet into a predetermined size. ; The micro aperture, focused ion beam, FIB, ion bar, micro-lenses, micro-column