WAFER FORM LOT IDENTIFICATION AND SEMICONDUCTOR PRODUCTION DEVICE FOR RECOGNIZING LOT IDENTIFICATION OF WAFER THEREOF

摘要

The present invention relates to a semiconductor manufacturing apparatus for forming a bar code on the flat zone of the wafer is recognized that the bar code is formed.; A semiconductor manufacturing apparatus for identifying the lot information of the wafer of the invention for this purpose is provided with a plurality of cassettes which the wafer is housed a bar code formed on the flat zone region, and the cassette when it rests formed on the wafer to carry out the process and which receives the bar code the bar code reader for reading the bar code, the read bar code from the bar code reader control to display the lot information, and calculates the process history of the wafer controller, a display unit for displaying the read lot information from the controller It includes.