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electroplating bath for copper-nickel alloy and method for manufacturing thin film using said electroplating bath
electroplating bath for copper-nickel alloy and method for manufacturing thin film using said electroplating bath
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机译:用于铜-镍合金的电镀浴和使用该电镀浴的薄膜制造方法
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摘要
The copper-nickel alloy thin film plating solution and the thin film manufacturing method using the solution comprises a DTPA as a mixed solution with a complexing agent of dongyeom (CuSO 4 H 2 O) and nickel salts (NiSO 4 6H 2 0), the dongyeom is 24.7 ~ 49.9 g / L, the nickel salt has a range of 209.6 ~ 235.8 g / L, the amount of DTPA is added 39.3 ~ 78.6 g / L range. Further, copper-nickel alloy plating solution further comprises the use of sodium to alkaline as an additive for the uniformity of the surface layer to improve the smoothness and gloss of sodium heptane tonsan, plated surface.; As another embodiment of the invention, the copper-current density of the composition to have a 60 to 80 wt% of nickel using a nickel alloy plating solution is 30 ~ 50 A / cm 2, the value of pH is 6.0, the range of ± 0.5 copper formed in - the method of producing a nickel alloy thin film is provided.
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机译:铜-镍合金薄膜电镀液及其使用的薄膜制造方法,其特征在于,将DTPA与东阳络合物(CuSO 4 Sub> H 2 Sub> O)和镍盐(NiSO 4 Sub> 6H 2 Sub> 0),dongyeom为24.7〜49.9 g / L,镍盐的范围为209.6〜235.8 g / L ,DTPA的添加量增加了39.3〜78.6 g / L的范围。此外,铜-镍合金电镀液还包括使用钠至碱作为添加剂,以提高表面层的均匀性,以改善庚烷钠扁桃钠电镀表面的光滑度和光泽度。作为本发明的另一个实施方案,使用镍合金镀液的镍含量为60-80wt%的组合物的铜电流密度为30〜50A / cm 2,其值为pH为6.0,提供了形成镍合金薄膜的方法中形成的±0.5的铜的范围。
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