Apparatus and methods of contactless voltage measurements for electronic circuits

摘要

The voltage measuring device and method for contactless electronic circuit. Contactless electronic circuit voltage measurement device is installed in the chamber, the connection lines to the electron guns, pad, between the pad electron beam is incident circuitry having a pattern formed on an upper surface thereof for generating an electron beam electrically connecting the formed sample, a position of the incoming path of the electron beam electron spectroscopic means for analyzing the distribution of the secondary electron energy to be emitted from the circuit pattern on the sample, provided in the chamber and a secondary electron detector for collecting secondary electrons emitted by the electron spectral method from the circuit pattern of the sample, and a secondary electron is connected to the detection means comprises a voltage measuring means for measuring a pattern voltage of the sample circuit is irradiated with a secondary electron voltage waveform of the detected therefrom, electron spectroscopic means is above a certain of the secondary electrons emitted from the circuit pattern of the sample energy level secondary the electron blocking and electron blocking mesh net mesh net passing only subtrochanteric To put connected to the electron extraction grid mesh, e extraction mesh net to help the emission of secondary electrons emitted secondary electrons from the sample are to be applied to more than several hundred volts positive DC voltage to be pulled into an electron blocking mesh net to the electronic extraction grid network a first power supply providing means, and connected to an electron blocking mesh net, firstly, that only more secondary electron constant energy level can reach the secondary electron detection means, the frequency is several tens to several hundreds Hz and ± lamp of tens of volts type and teeth one of the voltage type and a second power source provides a means for applying.