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Method of detaching thin-film device,method of transferring thin-film device,thin-film device,active matrix substrate,and liquid crystal display
Method of detaching thin-film device,method of transferring thin-film device,thin-film device,active matrix substrate,and liquid crystal display
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机译:薄膜器件的拆卸方法,薄膜器件的转移方法,薄膜器件,有源矩阵基板和液晶显示器
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摘要
A separation layer is provided on a substrate, and a thin film device, such as TFT, is formed thereon. Separation accelerating ions such as hydrogen ions are implanted into the separation layer in the course of the process for forming the thin film device. After the formation of the thin device, the thin film device is preferably joined to a transfer material through an adhesive layer, and irradiated with laser light from the substrate side. This causes separation in the separation layer by also using the action of the separation acceleration ions. The thin film device is separated from the substrate. This permits transfer of a desire thin film device to any substrate.
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