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REFRACTION LENS, REFRACTION LENS MANUFACTURING METHOD AND ERROR DETECTION SYSTEM USING THE LENS
REFRACTION LENS, REFRACTION LENS MANUFACTURING METHOD AND ERROR DETECTION SYSTEM USING THE LENS
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机译:折射透镜,折射透镜的制造方法以及使用该透镜的误差检测系统
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摘要
PURPOSE: A refractor, a method for fabricating a refractor, and an error detection system using the same are provided to detect a focus error and a spherical aberration error and reduce the power consumption by using an optic complex function lens and an error detector. CONSTITUTION: A refractor includes an internal lens part and a doughnut-shaped external lens part. The internal lens part(32) is formed on an upper surface of a single glass substrate in order to provide a reference focus. The doughnut-shaped external lens part(33) is formed around the internal lens part in order to surround the internal lens part. The focal length between the doughnut-shaped external lens part and the internal lens part is changed by generation of spherical aberration. The internal lens part is formed with an elliptical lens in order to detect a focus error.
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