METHOD FOR CONTROLLING QUALITY OF MANUFACTURE OF MICRO-MECHANICAL DEVICES

摘要

FIELD: measuring technologies.;SUBSTANCE: method is used for devices containing moving element, electrostatic force indicator and moveable element displacement sensor. Method includes forming of harmonic signals at input of force set-point device and measuring harmonic signals at output of displacement indicator. Amplitude-frequency characteristic of micro-mechanical device is determined by calculating relation of amplitude of second harmonics at output of displacement sensor to signal amplitude at input of force set-point device.;EFFECT: higher precision.;2 cl, 6 dwg