A method for determining the electrical properties of high-frequency excited gas discharges by calculation, with an inverse matrix, which is determined by a one-time calibration

摘要

Disclosed is a measuring system, with which the electrical properties of high-frequency excited gas discharges (for example, laser or plasma chambers) are determined. In front of the measurement, the system with three different known calibration elements calibrated. Two probes, the two linearly independent, to supply signals are mounted close to the gas discharge. The measurement signals are combined with a the digital oscilloscope or an a / d - card is recorded and processed further in a pc. In the case of the calibration is created a calibration matrix. During the measurement by the inverse of the two calibration matrix speed the voltage, and the current and the associated phase angle at the gas discharge, and further electrical quantities determined therefrom. The measurement with continuous wave (cw) - and can be carried out in the pulsed operation. The measuring system is by means of which any selection of the probes for different rf - powers in the range up to a few 10 kw scalable. By means of the additional calibration with the harmonics of the rf - frequency is a spectral measurement is possible.