Use of the matching device for an induction - plasma burner device and method for the electrical control and regulation of an induction - plasma burner device

摘要

Use of the matching device for an induction - plasma burner device (10) with an induction coil (18) for the production of a plasma in a plasma chamber (12), comprising at least one high frequency - generator (60; 84, 86), which controls the induction coil (18), characterized in that an absorption resistor (82) is provided, which is in contact with a load impedance (78), which consists of the induction coil (18) is formed and matching elements, is coupled in such a way that the power supply of the at least one high frequency - generator (60; 84, 86) on the load impedance (78) and the absorption resistor (82) can be divided, wherein the absorption resistor (82) electrical power and can be converted into ohmic heat.