An optical measuring method for determining of ideal shape deviations technically polished surfaces and precision measuring machine for carrying out of the measuring method

摘要

An optical measuring method for determining of ideal shape deviations technically polished surfaces with a flat or curved course, in which• a unit under test (10) is arranged so as to be displaceable,• the test sample (10) with at least two measuring beams impinge on a reference is probed freely deflektometrisch,• the measuring beams are generated in such a way, and guided to be detected, that at least two different optical measuring strategies can be performed, wherein the measuring beams impinge on in each case by means of displaceable beam deflection units (15) on the surface of the test specimen (10) and is deflected under the respective angle of reflection are correspondingly detected,• the by the total number of measuring beams used for administering caused tart or gateau locally and / or temporally identical and / or be selected to be offset in such a way that a pooling evaluation of a plurality of with different measuring strategies of detected measured values to a common measured value in assignment to a antastort is possible, and in the case of the• a pooling evaluation of a plurality of with different measuring strategies of detected measured values to a common measured value in assignment to a antastort is carried out under application of a selectable evaluation strategies, which leads to a..