Potentiometric process comprises use of rigid galvanic electrolyte cell to analyze nature of gas at reduced pressure in plasma coating process

摘要

A potentiometric process employs a rigid galvanic electrolyte cell to analyze the nature of a gas at reduced pressure. In addition to the cell voltage, the temperature is also measured of the measuring electrode and the reference electrode. Both values are included in calculations of the analyzed gas data. An independent claim is also included for an apparatus for the above process.