Device for producing thin layers of coating components/elements, alloys or compounds on a substrate comprises a cylindrical pot, a cylindrical tube, a substrate heater, a lid, a radiation shield, and a source for the coating components

摘要

Device for producing thin layers of coating components/elements, alloys or compounds on a substrate comprises a cylindrical pot made from high heat-resistant heat-insulating material, a cylindrical tube made from high heat-resistant material with a substrate holder standing concentrically on the base of the cylindrical pot, a substrate heater having an electrical hot conductor, a lid made from inert material with a central hole having at least the outer diameter of the substrate holder, a radiation shield made from heat-resistant material, and a source for the coating components.