Hot film air mass sensor with a porous supporting structure and porosity gradient under the sensor membrane and production method

摘要

The present invention relates to a hot film air mass sensor comprising a sensor chip (3) with a sensor membrane (4), on the sensor diaphragm (4) at least one heating element (6) and two temperature sensors (7) are arranged. Under the sensor diaphragm (4) is a porous supporting structure (11) received, the porosity with increasing distance from the sensor diaphragm (4) decreases.