首页> 外国专利> Mounting method for semiconductor chip, involves deflecting gripper relative to bonding head so as to lower chip at soldering portion of substrate and then raising it by preset distance before being let go by gripper

Mounting method for semiconductor chip, involves deflecting gripper relative to bonding head so as to lower chip at soldering portion of substrate and then raising it by preset distance before being let go by gripper

机译:半导体芯片的安装方法,包括使夹具相对于键合头偏转,以使芯片在基板的焊接部分处下降,然后将其升高预定的距离,然后被夹具释放。

摘要

The semiconductor chip (1) is held by the elastic gripper (5) attached to the bonding head (4). The chip is raised over the soldering portion (2) of the substrate (3) to specific position. The chip is lowered over the solder portion, by deflecting gripper relative to head so as to mount chip on soldering portion, and the chip is then raised by a preset height before being let go by gripper. The lowering and raising height of bonding head relative to the bearing seat (9) of the substrate is measured by a sensor. Based on the measured height value, deflection height of bonding head is determined. The chip is moved vertically and repeatedly based on the deflection amount. An independent claim is also included for semiconductor chip mounting device.
机译:半导体芯片(1)由安装在接合头(4)上的弹性夹具(5)保持。芯片在基板(3)的焊接部分(2)上升高到特定位置。通过使夹持器相对于头部偏转以将芯片安装在焊接部分上,从而使芯片下降到焊料部分上方,然后将芯片提升到预设高度,然后由夹持器放开。粘合头相对于基板的轴承座(9)的降低和升高高度由传感器测量。基于测得的高度值,确定键合头的挠曲高度。芯片根据偏转量垂直重复移动。半导体芯片安装装置也包括独立权利要求。

著录项

  • 公开/公告号CH694792A5

    专利类型

  • 公开/公告日2005-07-29

    原文格式PDF

  • 申请/专利权人 ESEC TRADING SA;

    申请/专利号CH20000001624

  • 发明设计人 LUECHINGER CHRISTOPH;LIMACHER MARKUS;

    申请日2000-08-17

  • 分类号B23K3/06;H01L21/60;H05K3/34;B23K1/20;

  • 国家 CH

  • 入库时间 2022-08-21 22:01:09

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