Filter element production involves applying membrane layer to substrate, etching membrane chamber to leave residual layer of substrate, producing pores in membrane layer, and removing residual layer

摘要

Production of a filter element involves applying a membrane layer to a substrate, etching a membrane chamber on the side of the substrate lying opposite the membrane layer so that a residual layer of the substrate remains, producing pores in the membrane layer using a lithographic and etching process to create a perforated membrane, and removing the residual layer by etching to expose the membrane layer. Production of a filter element involves applying a membrane layer (1) to a substrate (2), etching a membrane chamber (3) on the side of the substrate lying opposite the membrane layer so that a residual layer (5) of the substrate remains, producing pores (6) in the membrane layer using a lithographic and etching process to create a perforated membrane, and removing the residual layer by etching to expose the membrane layer. The membrane layer is additionally treated during the first step or in a later step to raise its mechanical strength. An independent claim is also included for a filter element produced by the above process.