Method for supplying gases to vacuum coating apparatus comprises gas inlet fitted with valve operated by control unit containing pulse width modulator transmitting commands to open and close valve with predetermined frequency

摘要

Supplying gases to a vacuum coating apparatus comprises a gas inlet (7) fitted with a valve (8) operated by a control unit (9). This contains a pulse width modulator (10) which transmits commands to alternately open and close the valve with a predetermined frequency. An independent claim is included for the apparatus.