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Determining depth of recesses formed in supporting substrate involves recording and evaluating time profile of reduction in weight of substrate during evaporation of moistening substance
Determining depth of recesses formed in supporting substrate involves recording and evaluating time profile of reduction in weight of substrate during evaporation of moistening substance
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机译:确定在支撑基板中形成的凹槽的深度涉及记录和评估在润湿物质蒸发期间基板重量减少的时间曲线
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摘要
The method involves applying an essentially uniform layer of moistening substance (3) to an area of the substrate (1) surface with recesses (2), recording a time profile of the reduction in weight of the substrate during evaporation of the substance, evaluating the time profile to determine a characteristic weight value when the substance has evaporated from the surface but the recesses are still filled with it and determining the depth (R) of the recesses taking into account the specific weight of the substrate without the substance, the density of the substance and the total area occupied by the recesses.
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