Gas sensor with long term stability measures thermo-emf, for an applied temperature gradient, of a metal oxide semi-conductor layer of very low thickness

摘要

Gas sensor comprises a silicon or ceramics substrate on which is deposited a metal oxide semi-conductor layer as a functional surface (FS), where the layer thickness, or grain size of a polycrystalline deposit forming the surface, is smaller than the Debye separation in the metal oxide. A thermal gradient is applied to the sensor and the thermoelectric emf is measured.