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Plasma generator for vacuum coating processes uses arc generation controlled by anode current measurement
Plasma generator for vacuum coating processes uses arc generation controlled by anode current measurement
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机译:用于真空镀膜工艺的等离子发生器使用通过阳极电流测量控制的电弧产生
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摘要
The plasma generator system has a hollow cathode [1] that is wound with a heating filament [4] and an anode [3]. Coupled to the anode is a transducer [7] that measures the anode current. Electrical power is supplied [2] and is controlled by the difference [9] between the measured current and a reference value.
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