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Miniaturized twin-axle piezoelectric operating device for micro-positioning has two piezoelectric actuators, lever elements to transfer force and solid-state flectors
Miniaturized twin-axle piezoelectric operating device for micro-positioning has two piezoelectric actuators, lever elements to transfer force and solid-state flectors
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机译:用于微定位的小型化双轴压电操作装置,具有两个压电致动器,传递力的杠杆元件和固态偏转器
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摘要
Solid-state flectors (3-6) as totally flat, table-shaped components apply a micro-position and movement control to optical, mechanical or other devices. Within a support frame (1) there is a rectangular plate (2) for holding devices to be positioned or moved. The flectors move the plate opposite the support frame and each extend towards the support frame in the area of the plate's corners.
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