Carbon layer formation, comprises precipitating a layer by introducing a carbon containing gas to a hydrogen atmosphere at high pressure and temperature

摘要

A process for producing a carbon layer with a specific resistance less than 1mOhmcm and a hardness of 2-9Gpa, comprises precipitating the carbon layer. The substrate is in a hydrogen atmosphere with a pressure of 1-4 hectopascals and a temperature of 600-1000oC. A gas containing carbon is added to form the carbon layer.