Photo emission electrons - - microscopy and measuring methods using the microscopy

摘要

Photo emission electrons - - microscopy, the system has a light sources, in order to achieve a high resolution measurement, for example a discharge work distribution measurement or a magnetization distribution measurement with reliability, and a high sensitivity - measuring method, in which the photo emission electrons - - microscopy is used. A photo emission electrons - - microscopy, which an excitation light sources - system in which a sample (7) with an irradiating light of a light source (1) is irradiated, uses a vacuum chamber (5), in which the sample is arranged, and an objective lens (32), which collects the illumination light on a specimen surface. The objective lens is accommodated in the vacuum chamber. The light source can be arranged outside the vacuum chamber. A condenser lens (2), which the illumination light from the light source generally parallel, can be between the light source and the vacuum chamber be arranged. A transmission window (6), which transmits the illumination light, while the vacuum chamber is sealed off, between the condenser lens and of the objective lens. If a refraction grid for selecting the wavelength of the irradiation light or a polarization filter for select them the direction of circularly - polarized light in the illumination light between the condenser lens and the transmission window is used, can be a high resolution measuring an exit work distribution or a ..