Sputter target for target base plate in vacuum coating unit has oval shape with central aperture and inner and outer peripheral grooves in which locking strips are positioned, bores above groove allowing base plate to be bolted to it

摘要

Sputter target (12) for a target base plate (14) in a vacuum coating unit has an oval shape with a central aperture. It has inner and outer peripheral grooves (30, 32) in which locking strips (24) are positioned. Bores above the groove allow the base plate to be fastened to it by bolts (16).