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Non-invasive interferometric detection and measurement of optoelectronic properties employs scanner sweeping inspection and reference zones at specified frequencies
Non-invasive interferometric detection and measurement of optoelectronic properties employs scanner sweeping inspection and reference zones at specified frequencies
The probing beam (23) has a scanner (33) sweeping it over the zone of inspection (34) and a reference zone (36). Image acquisition frequency (f) exceeds the cut-off frequency (fc), images being recorded by measuring variations in phase of the light beam (7). The scanner operates in a first spatial direction at frequency fx and in a second spatial direction at frequency fy to form an image of (n x m) pixels. fx = fy/n and fy = fa/m, fx and fy exceed fc. A confocal microscope measures phase variations, being used to form an image of a plane in the zone of investigation (34). The medium can be displaced in three dimensions under the beam. Opto-acoustic deflectors (35) ahead of the microscope perform scanning as described. One deflector following the microscope is controlled for order 0 inclination with respect to the optical axis and to keep order 1 paraxial. A Galilean lens increases the angle alpha between the first order and the optical axis. In addition, ahead of the microscope, incident beam polarization is controlled. An independent claim is also included for the corresponding method.
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机译:探测梁(23)具有扫描仪(33),将其扫过检查区域(34)和参考区域(36)。图像获取频率(f)超过截止频率(fc),通过测量光束(7)的相位变化来记录图像。扫描仪在第一空间方向上以频率fx操作,并在第二空间方向上以频率fy操作,以形成(n x m)个像素的图像。 fx = fy / n和fy = fa / m,fx和fy超过fc。共聚焦显微镜测量相位变化,用于在研究区域中形成平面图像(34)。介质可以在光束下在三个方向上移动。显微镜前面的光声偏转器(35)进行扫描,如上所述。跟随显微镜的一个偏转器相对于光轴的倾斜度控制为0阶,并保持近轴1阶。伽利略透镜会增加一阶和光轴之间的角度α。另外,在显微镜之前,入射光束的偏振受到控制。对于相应的方法也包括独立权利要求。
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