首页> 外国专利> Interferometric distance measurement appts. - has variable wavelength and reference sources with common spectral region and forms optically isolated measurement and reference interferometers and detects difference frequency w.r.t. reference frequency

Interferometric distance measurement appts. - has variable wavelength and reference sources with common spectral region and forms optically isolated measurement and reference interferometers and detects difference frequency w.r.t. reference frequency

机译:干涉式距离测量装置。 -具有具有共同光谱区域的可变波长和参考源,并形成光学隔离的测量和参考干涉仪,并检测差频w.r.t。参考频率

摘要

The radiation sources include a stabilised laser diode (1), the variable laser diode (2) and the variable laser diode (3) with the frequency doubling crystal (3a). One second stable frequency source at least can be used as a reference wavelength or frequency. The radiations are collimated, optically isolated, united, divided, reflected, reunited, separated and detected. The double interferometric systems form respectively a measurement interferometer and a reference interferometer eg Fabry-Perot . The two radiations are passed through them, and a separate detection of the interference phenomena of each individual radiation is ensured. Photo sensors detect the difference frequency of the radiation compared to the reference frequency. The received signals are supplied to the electronic circuits and the results are stored, interpolated and processed and also compared, to determine the unknown dimension of the measurement interferometer arm. ADVANTAGE - Facilitates interferometric distance measurement.
机译:辐射源包括稳定的激光二极管(1),可变激光二极管(2)和带有倍频晶体(3a)的可变激光二极管(3)。至少一个第二稳定频率源可以用作参考波长或频率。辐射经过准直,光学隔离,合并,划分,反射,重新合并,分离和检测。双干涉仪系统分别形成测量干涉仪和参考干涉仪,例如Fabry-Perot。两个辐射穿过它们,并确保分别检测每个单独辐射的干扰现象。光电传感器检测与参考频率相比的辐射差异频率。接收到的信号被提供给电子电路,结果被存储,内插和处理并进行比较,以确定测量干涉仪臂的未知尺寸。优势-促进干涉式距离测量。

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