Micro-machined vibrating structure for use in microgyrometer, has anchoring end integrated to fixed support, and naturally uncoupled zone located between anchoring end and free end of vibrating wall

摘要

The structure has an anchoring end (5) integrated to a fixed support (6), and a vibrating wall (7) comprising a base (8) and a free end (9). Stationary or progressive waves are generated in the vibrating wall. A naturally uncoupled zone is located between the anchoring end and the free end of the vibrating wall. The anchoring end is constituted by the base of the vibrating wall. An independent claim is also included for a microgyrometer comprising a micro-machined vibrating structure.