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Acoustic resonance circuit for micro-electronic assembly, has inductor placed in series with e.g. BAW resonator having two resonant frequencies and voltage-dependent capacitor to adjust overall resonance
Acoustic resonance circuit for micro-electronic assembly, has inductor placed in series with e.g. BAW resonator having two resonant frequencies and voltage-dependent capacitor to adjust overall resonance
The circuit has a bulk acoustic resonator (212) with two resonance frequencies. An inductor (213) cancels the one of the resonance frequencies. A capacitance adjusting unit (211), e.g. a varactor, allows the tuning of the resonator to be adjusted at the other resonant frequency. The inductor is placed in series with the resonator and adjusted at a series resonance frequency of the resonator to reinforce adjustment at the parallel-resonant frequency. An independent claim is also included for a method of fabricating an integrated circuit including an acoustic resonator component.
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