Vertical comb-drive type electrostatic actuator for very large telescope, has two electrode sets moving with respect to each other, from rest to maximum positions, where sets partially and electrically overlap even in rest position

摘要

The actuator has a set of electrodes (13) associated to a substrate (14) that holds a suspending beam (12). Another set of electrodes (10) moves with respect to the former set, from a rest position to a maximum position, along a direction perpendicular to a reference plane defined by an upper surface of the substrate. The two sets of electrode partially and electrically overlaps even in the rest position. Independent claims are also included for the following: (A) an actuating matrix including actuators (B) a deformable mirror including deformable membranes supporting a surface supported by an actuating medium (C) a method of fabricating an actuator.