Vacuum valve for turbo-molecular pump, has rod moving in slider bore, where movement of rod is guided and limited by ring to enable closing of vacuum valve by impulsion of gas reflux, and piston connected to arm indicating valve positions

摘要

The valve has a check valve (3) supporting a rod (5) which moves in a bore of a slider (6). The movement of the rod is guided and limited by a ring to enable closing of the valve by impulsion of gas reflux. A piston (9) is pushed or retained by compensating springs based on elastomer joint or metallic bellow technology and is connected to an arm (10) which indicates opening, closing or protected opening positions of the valve.