METHOD AND DEVICE OF CONVERSION FACTOR CALIBRATION OF FRINGE MEASURING DEVICE AND FRINGE MEASURING DEVICE WITH CONVERSION FACTOR CALIBRATION DEVICE

摘要

PROBLEM TO BE SOLVED: To make a conversion factor value set in a fringe measuring device for converting from a coordinate system of a measurement space to a coordinate system of an actual space capable of being easily calibrated in a short period of time.;SOLUTION: A calibration tool 3 with reflection surfaces 31, 32 structured to form an angle of a reference value is mounted and a fringe image having inclination information of the respective surfaces 31, 32 is pictured by the fringe measuring device. Based on the fringe image, the angle of the two surfaces in the coordinate system of the measurement space is calculated and the conversion factor value is calibrated so that the calculated value becomes equal to the reference value in the predetermined unit system.;COPYRIGHT: (C)2007,JPO&INPIT