MANUFACTURING METHOD OF MULTI-BRANCHED OPTICAL WAVEGUIDE SUBSTRATE, MULTI-BRANCHED OPTICAL WAVEGUIDE CHIP USING THE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To effectively manufacture a multi-branched optical waveguide chip by cutting-out the multi-branched waveguide chip from the multi-branched waveguide substrate disposed with a good distribution efficiency by using a dicing saw.;SOLUTION: The multi-branched optical waveguide substrate 1 is composed of a multi-branched optical waveguide unit 3 in which each multi-branched optical waveguide 2 is arranged, in such a manner that from a single optical waveguide branched to a plurality of waveguides diverging in a fan shape and diverging to reverse direction are alternately arranged and another multi-branched optical waveguide unit 4 which is arranged oppositely regarding the in/out terminal face 5 and the plurality of optical waveguide in/out terminal faces 6 to the multi-branched optical waveguide unit 3, and the multi-branched optical waveguide unit 3 and the multi-branched optical waveguide unit 4 are arranged separately. The method of manufacturing the multi-waveguide chip 7 is such that the individual multi-branched optical waveguide chip 7 is cut-out from the multi-branched optical waveguide substrate 1 with a dicing saw.;COPYRIGHT: (C)2006,JPO&NCIPI