SYNTHETIC METHOD OF CARBON NANOTUBE FILM BY INTRODUCTION OF GAS PHASE INTO LIQUID PHASE AND SYNTHESIZING UNIT

摘要

PPROBLEM TO BE SOLVED: To provide a method of synthesizing a carbon nanotube film having high purity and high stability at a low cost on a massive scale, and a unit used for the method, and a carbon nanotube film formed on a substrate. PSOLUTION: In this method, a substrate 7, which is made of a catalyst metal or has a catalyst metal thin film deposited thereon, is put in an organic liquid 1 and the substrate 7 is heated to a certain temperature by a heater 5 while introducing, through a gas-introducing tube 9, bubbles 11 of an inert gas, a reducing gas, and a reactive gas around the substrate 7, and the carbon nanotube film is synthesized on the substrate 7. PCOPYRIGHT: (C)2006,JPO&NCIPI