FLATNESS MEASURING INSTRUMENT AND FLATNESS MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To detect the flatness of a specimen surface with high accuracy in a non-contacting and non-destructive manner by a simple instrument structure.;SOLUTION: This flatness measuring instrument 1 is equipped with: a semiconductor laser 10 for outputting a laser beam toward a specimen S which is a measuring object; a beam splitter 13 disposed on an optical path from the semiconductor laser 10 to the specimen S; a frequency analysis part 12 for outputting a laser beam from the semiconductor laser 10 to the specimen S to acquire a laser beam outputted from the laser 10 with the laser 10 affected by a return beam from the specimen S via a beam splitter 13, and detecting the frequency characteristics of the laser beam; and a calculation part 14 for calculating the flatness of the specimen S based on the frequency characteristics of the laser beam detected by the analysis part 12.;COPYRIGHT: (C)2007,JPO&INPIT