DRIFT CORRECTION METHOD AND APPARATUS IN FIB AUTOMATIC PROCESSING

摘要

PROBLEM TO BE SOLVED: To provide drift correction method and apparatus in FIB automatic processing, which can perform accurate processing on a test piece.;SOLUTION: The drift correction apparatus in FIB automatic processing comprises: a reference image setting means which sets a reference image area on the test piece; an image reading means 20 which reads images of the reference image area in processing; a calculation control means 30 which determines a direction and an amount of a drift between images before and after an ion beam irradiation from the images read in processing; a beam deflection block adjusting means which receives an output of the calculation control means 30, corrects the drift between the images on the basis of the direction and the amount of the drift between the images, and adjusts a beam deflection block; where the calculation control means 30 is designed so as to optimize an reference image in brightness or contrast.;COPYRIGHT: (C)2006,JPO&NCIPI