METHOD FOR FORMING FUNCTIONAL FILM, METHOD FOR FORMING ORIENTATION FILM AND METHOD FOR MANUFACTURING LIQUID CRYSTAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a functional film for efficiently forming a high quality film with an uniform thickness, a method for forming an orientation film and a method for manufacturing a liquid crystal device.;SOLUTION: The method for forming a functional film of the present invention comprises: a film forming step for forming a film by coating a substrate with a liquid material; and a solvent removing step for removing a solvent contained in the liquid material, wherein in the solvent removing step, the solvent is removed by vacuum drying in the state where the inside of a chamber is hermetically sealed and a pressure reached by vacuum is set to be not higher than the saturated vapor pressure of the solvent.;COPYRIGHT: (C)2006,JPO&NCIPI